The viscous PDMS (Polydimethylsiloxane) coated on the glass (Sylagard 184, Dowcoaning) is using the spin coating material. If we fix

the viscosity, density of coating material, initial thickness at 4000 cP, 965

kg/m3 and 0.105 cm, and then, the rotation time is fixed at time of 300s

and the rotation of device start from 500 to 6000 RPM. Calculate the final

thickness of the film at angular speed from 500-6000rpm (step by

500rpm) and draw the relationship between the final thickness (h) and

angular speed (ω).

CAN ANY ONE HELP
LAB OF MEMS DESIGN