Engineering, 11.03.2020 02:09 treylartigue
As a general rule of thumb, the ratio of the rate of etch-product formation to the flow rate of etch gas should be greater than 0.1 for uniform etching. Suppose a 7.5-cm diameter silicon wafer is etched at a rate of 50 nm/min in a CF4 plasma.
(a) How many atoms of Si are removed per minute?
(b) What evolution rate of SiF4 does this correspond to in standard cubic centimeters per minute (sccm)?
(c) What minimum CF4 flow rate should be maintained?
Answers: 2
Another question on Engineering
Engineering, 03.07.2019 14:10
Amass of 1.5 kg of air at 120 kpa and 24°c is contained in a gas-tight, frictionless piston-cylinder device. the air is now compressed to a final pressure of 720 kpa. during the process, heat is transferred from the air such that the temperature inside the cylinder remains constant. calculate the boundary work input during this process.
Answers: 2
Engineering, 04.07.2019 18:10
The mass flow rate of the fluid remains constant in all steady flow process. a)- true b)- false
Answers: 1
Engineering, 04.07.2019 18:10
Water at 70°f and streams enter the mixing chamber at the same mass flow rate, determine the temperature and the quality of the exiting stream. 0 psia is heated in a chamber by mixing it with saturated water vapor at 20 psia. if both streams enters the mixing chamber at the same mass flow rate, determine the temperature and the quality of the existing system.
Answers: 2
Engineering, 04.07.2019 18:10
The higher the astm grain-size number, the coarser the grain is. a)-true b)-false
Answers: 3
You know the right answer?
As a general rule of thumb, the ratio of the rate of etch-product formation to the flow rate of etch...
Questions
Mathematics, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
History, 12.11.2020 05:40
Business, 12.11.2020 05:40
Engineering, 12.11.2020 05:40
Geography, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
English, 12.11.2020 05:40
History, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
Mathematics, 12.11.2020 05:40
Computers and Technology, 12.11.2020 05:40
